JPH0319939U - - Google Patents

Info

Publication number
JPH0319939U
JPH0319939U JP1730890U JP1730890U JPH0319939U JP H0319939 U JPH0319939 U JP H0319939U JP 1730890 U JP1730890 U JP 1730890U JP 1730890 U JP1730890 U JP 1730890U JP H0319939 U JPH0319939 U JP H0319939U
Authority
JP
Japan
Prior art keywords
pressure
sensitive diaphragm
diaphragm chip
silicon pressure
ceramic substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1730890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1730890U priority Critical patent/JPH0319939U/ja
Publication of JPH0319939U publication Critical patent/JPH0319939U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP1730890U 1989-02-22 1990-02-22 Pending JPH0319939U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1730890U JPH0319939U (en]) 1989-02-22 1990-02-22

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1971089 1989-02-22
JP1730890U JPH0319939U (en]) 1989-02-22 1990-02-22

Publications (1)

Publication Number Publication Date
JPH0319939U true JPH0319939U (en]) 1991-02-27

Family

ID=31717366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1730890U Pending JPH0319939U (en]) 1989-02-22 1990-02-22

Country Status (1)

Country Link
JP (1) JPH0319939U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0961271A (ja) * 1995-08-29 1997-03-07 Mitsubishi Electric Corp 半導体式センサ及びその製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5756977A (en) * 1980-09-20 1982-04-05 Mitsubishi Electric Corp Semiconductor pressure detector
JPS57186138A (en) * 1981-05-12 1982-11-16 Fuji Electric Corp Res & Dev Ltd Pressure sensor
JPS58211616A (ja) * 1982-06-03 1983-12-09 Fuji Electric Co Ltd 半導体式圧力センサ
JPS5965741A (ja) * 1982-10-07 1984-04-14 Fuji Electric Co Ltd シリコン感圧装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5756977A (en) * 1980-09-20 1982-04-05 Mitsubishi Electric Corp Semiconductor pressure detector
JPS57186138A (en) * 1981-05-12 1982-11-16 Fuji Electric Corp Res & Dev Ltd Pressure sensor
JPS58211616A (ja) * 1982-06-03 1983-12-09 Fuji Electric Co Ltd 半導体式圧力センサ
JPS5965741A (ja) * 1982-10-07 1984-04-14 Fuji Electric Co Ltd シリコン感圧装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0961271A (ja) * 1995-08-29 1997-03-07 Mitsubishi Electric Corp 半導体式センサ及びその製造方法

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